PRODUCT
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Electronic Industry
Proposal
Point Of Use Scrubber (Plasma & Wet EP)
Application
- Semiconductor, LCD, and Solar processes that use harmful gases
- PFCs gases: NF3, SF6, CF4, C2F6, C3F8, etc.
- Flammable gases: SIH4, DCS, TEOS, H2, PH3, etc.
- Water Soluble gases: Cl2, HF, HCl, NH3 etc.
Benefits
- Durable components - cost savings in maintenance
- Energy-saving function - reduces operating costs
- High Performance - Efficient gas treatment
- Complete treatment of fine particulate pollutants through the use of EP
Background
- Toxic gases are used in large quantities for semiconductor manufacturing - may potentially cause air and water pollution
- Various types of abatement systems are used to treat them
- To maximize treatment efficiency, POU scrubbers are used
- ※ The most efficient method is to treat it in low-flow and high-concentration conditions at the nearest point to the production equipment
