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Electronic Industry

Proposal

De-NH3 System

Application

  • Treatment of ammonia used in semiconductor processes
  • Exhaust environment containing ammonia in various chemical and pharmaceutical manufacturing processes

Benefits

  • Elimination of hazardous materials such as sulfuric acid
  • Improvement of the acidic waste-water generation issue
  • Deal with NH3 gas concentration regulation
Background
  • In the semiconductor manufacturing process, a significant amount of ammonia is used, which can cause odor problems and contribute to air pollution
  • Although ammonia is easily soluble in water, its treatment process requires a large amount of water consumption
  • To reduce water usage, hazardous substances such as sulfuric acid are used to increase the water's acidity
  • → A technology that can safely increase the acidity of water is needed