PRODUCT
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Electronic Industry
Proposal
Wet-EP System
Application
- Semiconductor processes such as CVD and Diff, where large amounts of fine particles are emitted
- Treatment of fine particles discharged from the Bio Industry
- Treatment of fine particles emitted from Incinerators
- Various facilities that emit fine dust
Benefits
- Treats complex pollutants such as particulate matter, HF, and mist simultaneously
- Auto-cleaning function for easy maintenance
- Able to comply with fine dust emission regulations
- Customized on-site design possible
Background
- During manufacturing processes of various industries such as semiconductor, steel, oil refining, and power generation produce large amounts of gas
- Need to manage as substances subject to air emission environmental regulations
- Air emission regulations become stricter every year, and a continuous need for countermeasures is required
