Application

• NOx emissions occur in various manufacturing processes, including the semiconductor industry
• Facilities where NOx is generated in the rear of power plant boilers
• When NOx and SOx are treated simultaneously in power plants and incinerators
• Environment where reduction of complex pollutants such as NOx and large amounts of fine particles is necessary

Benefits

• Additional application is possible to the existing wet scrubber equipment in semiconductor processes (customized on-site design)
• Cost savings can be achieved by utilizing existing Wet facilities
• Complex treatment of fine particles including NOx, Sox, and HF
• Address regulations on total NOx emissions and fine particle emissions